The nanotechnologies require to build complex heterostructures at an atomic scale. Those are generally carried out by deposition on a substrate (metal or oxide). The control of the physical phenomena of the growth and the realization of dots or thin films of well defined structure is one of the keys of the realization of new devices with new properties. The teams of the DRECAM largely use the various techniques of deposition, control of the growth and analyses and contribute to develop them.